DOI:
https://doi.org/10.14483/2322939X.4065Publicado:
2004-12-01Número:
Vol. 1 Núm. 1 (2004)Sección:
Investigación y DesarrolloINFLUENCIA DE PROCESOS TECNOLÓGICOS DE MICROELECTRÓNICA EN TENSIONES ELÁSTICAS Y EN DEFECTOS DE LA RED CRISTALINA
Palabras clave:
Tensiones Elásticas, Deformación, Defectos, Dislocaciones. (es).Descargas
Resumen (es)
Las investigaciones de la influencia de las operaciones de los procesos tecnológicos de fabricación de semiconductores en las tensiones elásticas de material y en los defectos puntuales y lineales son muy importantes para el desarrollo de electrónica.
En el presente artículo se realiza el resumen de los resultados científicos publicados en las revistas internacionales sobre las tensiones elásticas y sobre comportamiento de los defectos de la red cristalina durante procedimiento tecnológico de fabricación de las estructuras semiconductoras.
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